A412 and A400 Covering

Semiconductor industry

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A412 and A400 Covering

The Advance is a batch-vertical oven for advanced semiconductor applications. Vertical batch processing increases productivity because a large quantity of wafers can be loaded into the oven chamber for simultaneous thermal processing. The A412 PLUS is for covering wafers of 300 mm, whereas the A400 is suitable for 200 mm and smaller wafers.

Quality assurance is important

Quality assurance is incredibly important during this production process. Therefore ITEQ prepares the work instruction in detail in advance, aligned to the customer’s requirements. When supplying new products we include a first article inspection (FAI) and provide a measurement report at the customer’s request.

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