5-stack platform

Alternative energy

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5-stack platform

The 5-stack platform is for the production of solar power generation machines. The platform is intended for PO13, BBr3 and annealing/oxidation processes. The advanced system configuration processes high wafer loads and guarantees stable, reproducible and versatile process conditions at the lowest consumption costs.

The compact design contains heating elements with little loss and environmentally-friendly recirculation cooling, which results in energy savings in excess of 25%.

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